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The XY Theta indexing table:

A vibration free solution
to movement restriction on wire bonders.

Our assignment was to carry out bumping on 125 mm diameter silicon wafers, while the machine's capacity for movement did not enable the whole surface to be covered

The solution we selected enabled the part to be processed to be presented on-line, without the operator having to move the substrate between bonding sequences.

Caléo Engineering is part of Caleo group

ACTIVITY Caléo Engineering is an Automation and Equipment Manufacturing Company specialized in the field of Electronic Assembly, Semiconductors Packaging, Smart Cards, C.O.B (Chip-on-Board), C.O.F (Chip-on-Flex), S.M.T (Surface Mounted Technology) and Hybrids Industries Our Company was first established to manufacture Controlled Atmosphere and In-line Infrared Ovens Subsequently, the Company developed Positioning and Indexing Systems for Semiconductors Assembling and Packaging Equipment Then, the Smart Card Technology opened up new perspectives, which lead us to develop solutions adapted to High-standard Applications, opening the way for a wide range of Customized Automates & Equipments dedicated to the Micro-electronic Market Today Caléo Engineering offers : ¦ Standard Products for Semiconductors, Smart Cards, C.O.B, C.O.F, S.M.T and Hybrids Applications ¦ Customized Sub-Systems for the micro electronic assembly applications ¦ Upgrades & Retrofits for Standard OEM Equipment ¦ Integration & Turnkey solutions HISTORY Founded in 1985 as the Engineering and Manufacturing Branch of Caléo Electronique (Trading & Service Co.), Robotherm becomes Caléo Engineering in June 2001 and offers its Know-How to other OEM and End-Users Worldwide 1985-1997 Robotherm developed as Caléo's Exclusive Contractor for End-Users' Specific Requirements 1997 Mr. Serge Bion, Caléo Sales Director, joined Robotherm as CEO & General Manager 1999 Robotherm moved in its new premise 2001 Robotherm becomes Caléo Engineering, member of Caléo Group Established Distributors and Service Network Capital increase from 230.000 up to 500.000 € .../... CALEO GROUP PRESENTATION Caléo Group Caléo Electronique Caléo Engineering Caléo Informatique Trading & Service Co. Automation & Equipment Manufacturing Co. Software Co. EEC, Switzerland, Morocco ECC / USA - Canada / Asia - South East Asia LOCATION Located at 23 Km from Paris downtown, in the South-West High Tech Area, Caléo Engineering moved into its new premise in 1999 • 200 m² of assembly workshop • 200 m² of office space Caléo Engineering ORGANIZATION CHART CEO & General Manager Administration Engineering & Design Software Development Assembly & Tests Service & Parts Sales & Marketing WE DEVELOP TO YOUR SPECIFIC REQUIREMENTS... Working alongside our customers in their projects enables us to : * Adapt or create interfaces for substrate handling * Integrate our products into production lines * Develop interfaces on the same line * Design new equipment Our skills cover the following areas : ¦ Mechanics ¦ Pneumatic ¦ Electro-technology ¦ Electronics As well as : ¦ Automation & Robotics ¦ Information technology ¦ Programming ¦ Software development * Development is carried out using the latest 3D tools * Assembly and tests are performed in our premise * Integration of systems is carried out in our premises * Final buy off is typically done in customers' premise Customer satisfaction is the fruit of our work and the manner we capitalize on experience. Every day, we focus on methods optimization and rely on an established methodology involving : 1. Review of technical specifications 2. Feasibility study, planning & budgeting 3. Review of customer P/O and specifications 4. Design and development 5. Manufacturing of components and sub-systems 6. Monitoring of sub-contractors 7. Assembling and electromechanical integration 8. Software integration and tests 9. Pre-acceptance 10. Packing, shipping 11. Final buy-off at the customer's site All these operations are subject to project monitoring in co-operation with the customer. In order to facilitate approvals or modifications, various stages of a project can be subject to drawings/photographs transmission HAKUTO ENTERPRISES Hakuto Enterprises Hong-Kong Head Office N° 404, Block B, Sea View Estate 2-8 Watson Road, North Point HONG KONG, China Hakuto Beijing Office N° 705 Jin Chen Center, Fang Qun Yun District 4 Fang Zhuang Residential Quarter BEIJING 100078, China Hakuto Shanghai Office N° 2702, 2703 Shanghai Square N° 138 Huai Huai Road (M) SHANGHAI 200021, China Hakuto Guangzhou Office N° 902, Guangzhou Hongkong Bank Bldg. 148-9 Dong Feng Xi Lu GUANGZHOU 510170, China Hakuto Shenzhen Office N° 543, 5/F., West Wing Bagua-Ling Ind. District SHENZHEN 5118029, China Contacts : Mr. Lawrence Law, Mr. Philip Tam STANDARD TECHNOLOGY CORP. Standard Technology Corporation Taipei N°2, Alley 13, Lane 18, Sec. 2, Ho-Ping East Rd. TAIPE, Taiwan ROC Standard Technology Corporation Hsinchu 3F-1, N°47, Lane 2, Section 2, Kwang Fu Road HSINCHU, Taiwan ROC Standard Technology Corporation Tainan N°13, Lane 11, Nan-chang Street Kong Chien Village, Hshin-Shih Shiang TAINAN, Taiwan ROC Standard Technology Corporation Kaohsiung 18F-1, N° 939, Tai-shuan 1 Rd. KAOHSIUNG, Taiwan ROC Contact : Mr. Leo Liu SUNGMOON SYSTECH CORPORATION 6th FloorCamport Building Seo Cho-Ku, Seoul 137-130 KOREA Contact : Mr. Sunny Baek HL ELECTRONICS HL Electronics Singapore Head Office 80 Genting Lane #08-06/07 Ruby Industrial Complex, 349565 SINGAPORE HL Electronics Philippines Office N° 303 Atienza Bldg, National Highway Nuevo San Pedro Laguna, 4023 PHILIPPINES HL Electronics Thailand Office N° 255, 4/F, Twin Tower 60/174-175 Chang Wattana Road Bang Talad Pakret, Nontaburi, 11000 THAILAND HL Electronics Malaysia Office, HRSM Tech. Sdn Bhd, 18 Lintang Beringin 3 Diamond, Valley Ind. Park Permatang Damarlant 11900, Batu Maunt, Penang MALAYSIA Contacts : Mr Harry Ong, Mr Steven Teo Contacts : Mr Harry Ong, Mr Steven Teo AIR/N2 INFRARED FURNACES Robotherm( FM 3500 SERIES FM 3500 - 61 / 6 Heating Zones FM 3500 - 101 / 10 Heating Zones APPLICATIONS Curing & Drying - Conductive, Non-Conductive Polymer - Resin, Epoxy, Glue, Adhesive - Die-Attach, Silver-Glass - Glob top, Encapsulant - Underfill Reflow Soldering - Package Lid Sealing - Heat Sink Attach - Wafer Bump - BGA/CGA - Flip Chip - Preform STANDARD FEATURES & BENEFITS Windows NT TM, graphic interface software - Computerized controls of Heating/Cooling Temperatures per zone, Conveyor system and Gas Injection Rate - Real Time, multi-point recording of product time/temperature thermal curve - On-Screen Profiling Robotherm(r) Conveyor - Unic Low-Low Mass System - In-Line transport system - Thermally invisible - Automatic tension - Adjustable speed - Vibration free conveyor - No oiling required - Standard working width of 350 mm Robotherm(r) Infrared Emitters - Unic Embedded Heating & Cooling Systems - Medium-to-Long Wave Spectrum - Maintenance free - Operating Temperature : 550°C max - 6 / 10 Individually Controllable Heating Zones - 2 individually Controllable Emitters per Zone - Peak temperature repeatability to within +/-1% - Over temperature protection Robotherm(r) Cooling System - 1 Controlled Cooling Zone - Switchable Air or Water Cooling - Additionnal Cooling zone in the unloading area Gas Flow Management System - Switchable Air or Nitrogen Injection - Excellent zones separation - Highly stable temperature environment - Gas injection and extraction per zone - Preheated gaz injection per zone - Exhaust System - Turbulence Free - Air or Nitrogen Curtain Stable and Reproducable process Ideal for processing all carriers and substrate materials Cleanroom Compatible Optimal accessibility for service and maintenance Durable low maintenance design for maximum "uptime" Common European (CE) Product Safety Certification SMEMA Compliant N2H2 INFRARED FURNACES Robotherm( FM 3500 N2H2 SERIES Up to 20% H2 Mixture FM 3500 N2H2 - 61 / 6 Heating Zones FM 3500 N2H2 - 101 / 10 Heating Zones APPLICATIONS Reflow Soldering, H2 Mixture Atmosphere <20% - - Package Lid Sealing - Heat Sink Attach - Wafer Bump - BGA/CGA - Flip Chip - Preform STANDARD FEATURES & BENEFITS Windows NT TM, graphic interface software, - Computerized controls of Heating/Cooling Temperatures per zone, Conveyor system and Gas Injection Rate - Real Time, multi-point recording of product time/temperature thermal curve - On-Screen Profiling Robotherm(r) Conveyor - Unic Low-Low Mass System - In-Line transport system - Thermally invisible - Automatic tension - Adjustable speed - Vibration free conveyor - No oiling required - Standard working width of 350 mm Robotherm(r) Infrared Emitters - Unic Embedded Heating & Cooling Systems - Medium-to-Long Wave Spectrum - Maintenance free - Operating Temperature : 550°C max - 6 / 10 Individually Controllable Heating Zones - 2 individually Controllable Emitters per Zone - Peak temperature repeatability to within +/-1% - Over temperature protection Robotherm(r) Cooling System - 1 Controlled Cooling Zone - Air or Water Cooling - Additionnal Cooling zone in the unloading area Atmosphere & Gas Flow Management System - Hydrogenated Nitrogen Injection - Burn-off of extracted gaz, - Nitrogen Automatic purge - Excellent zones separation - Highly stable temperature environment - Gas injection and extraction per zone - Preheated gaz injection per zone - Exhaust System - Turbulence Free - Nitrogen Curtain Stable and Reproducable process Ideal for processing all carriers and substrate materials Cleanroom Compatible Optimal accessibility for service and maintenance Durable low maintenance design for maximum "uptime" Common European (CE) Product Safety Certification SMEMA Compliant INFRARED CURING FURNACES Robotherm( FP 035 SERIES Tape & Reel Model APPLICATIONS Curing & Drying - Conductive, Non-Conductive Polymer - Resin, Epoxy, Glue, Adhesive - Die-Attach, Silver-Glass - Glob top, Encapsulant - Underfill STANDARD FEATURES & BENEFITS Graphic Interface Software, - Computerized controls of Heating Temperature per zone, Conveyor System and Gas Injection Rate - Real Time, multi-point recording of product time/temperature thermal curve - On-Screen Profiling Robotherm(r) Roller Traction System - Adjustable speed - Vibration free - No oiling required - Adjustable working width from 16 to 43 mm Robotherm(r) Infrared Emitters - Unic Embedded Heating & Cooling Systems - Medium-to-Long Wave Spectrum - Maintenance free - Operating Temperature : up to 350°C - 4 Individually Controllable Heating Zones - 2 individually Controllable Emitters per Zone - Peak temperature repeatability to within +/-1% - Over temperature protection - Automatic control for Substrate Integrity Cooling System - 1 forced Air Cooling Zone Atmosphere & Gas Flow Management System - Air Injection - Excellent zones separation - Highly stable temperature environment - Gas injection per zone - Exhaust System - Turbulence Free Ideal for processing products mounted on film and tape Stable and Reproducable process Cleanroom Compatible Optimal accessibility for service and maintenance Durable low maintenance design for maximum "uptime" Common European (CE) Product Safety Certification SMEMA Compliant INFRARED CURING FURNACES Robotherm( FP 035 SERIES Lead Frame Model APPLICATIONS Curing & Drying - Conductive, Non-Conductive Polymer - Resin, Epoxy, Glue, Adhesive - Die-Attach, Silver-Glass - Glob top, Encapsulant - Underfill STANDARD FEATURES & BENEFITS Graphic Interface Software, - Computerized controls of Heating Temperature per zone, Conveyor System and Gas Injection Rate - Real Time, multi-point recording of product time/temperature thermal curve - On-Screen Profiling Robotherm(r) Dual Belt Conveyor System - In-Line Transport System - Adjustable speed - Vibration free - No oiling required - Adjustable working width from 16 to 43 mm Robotherm(r) Infrared Emitters - Unic Embedded Heating & Cooling Systems - Medium-to-Long Wave Spectrum - Maintenance free - Operating Temperature : up to 350°C - 4 Individually Controllable Heating Zones - 2 individually Controllable Emitters per Zone - Peak temperature repeatability to within +/-1% - Over temperature protection - Automatic control for Substrate Integrity Cooling System - 1 forced Air Cooling Zone Atmosphere & Gas Flow Management System - Air Injection - Excellent zones separation - Highly stable temperature environment - Gas injection per zone - Exhaust System - Turbulence Free Ideal for processing products mounted on Lead Frame Stable and Reproducable process Cleanroom Compatible Optimal accessibility for service and maintenance Durable low maintenance design for maximum "uptime" Common European (CE) Product Safety Certification SMEMA Compliant ULTRA VIOLET DRYERS Robotherm( TAPE & REEL SERIES* FUV 210 FUV 310 CONVEYOR SERIES CUV 150 CUV 300 APPLICATIONS Curing & Drying - Ink, Resin, Epoxy, Glue, Adhesive - Glob top, Encapsulant - Die-Attach - Underfill STANDARD FEATURES & BENEFITS UV Emitters - System presented in an aluminum cassette - Extraction of infrared heat by air circulation - Pneumatic shutter - Overheat thermostat - Ozone extraction Controls - Hour counter, Lamp meter - Power selection - Automatic control of the shutter with alarm *Ideal for processing products mounted on film and tape Stable and Reproducable process Cleanroom Compatible Optimal accessibility for service and maintenance Durable low maintenance design for maximum "uptime" Common European (CE) Product Safety Certification SMEMA Compliant MATERIAL HANDLING SYSTEMS Robotherm( WORHOLDER / INDEXER SERIES "TO" Package Automatic Indexer APPLICATIONS "TO" Tape Indexing / "TO" Tape-Magazines Handling - Wire Bonding - Die Bonding - Testing OEM Equipements Upgrading - Wedge Bonder with rotating head - Ball Bonder - Die Bonder - Die Attach Cure - STANDARD FEATURES & BENEFITS "TO" Tape-Magazine Handler - Tape-Magazine loading/unloading area - Tape-Magazine index - Tape loading/unloading "TO" Tape Indexer - Indexing mechanism by clamps on each side of the tape - Clamps activation by pneumatic pistons - Clamps mounted on linear motor for index pitch - Programmable sequences (sequential or continuous) ''TO" Package Workholder - Stationary Workholder receiving 5 "TO" packages - Heat block up to 250°C - "TO" Package hold down by pneumatic clamp Electronic controller - Indexing sequences - Index pitch - Acceleration, speed, deceleration Programs are downloaded from an external P.C Acceleration : 0,01 à 2 G Resolution 0,5 µm Speed : up to 2 m/s Stable and Reproducable process Cleanroom Compatible Optimal accessibility for service and maintenance Durable low maintenance design for maximum "uptime" Common European (CE) Product Safety Certification SMEMA Compliant MATERIAL HANDLING SYSTEMS Robotherm( WORHOLDER / INDEXER SERIES Large Substrate Automatic Indexer* APPLICATIONS Large Substrate Auto-Indexing - Wire Bonding - Die Bonding - Sealing - Testing OEM Equipements Upgrading - Ball Bonder - Wedge Bonder - Die Bonder - Die Attach Cure - STANDARD FEATURES* & BENEFITS Worholder - Handling system of the substrate - Two mechanical clamps secure substrate - Auto centering by pneumatic pistons - X Axis stroke : up to 1000 mm (39,3 in) Motorization - Handling system mounted on a linear motor - Programmable sequence Electronic controller - Indexing sequences - Index pitch - Acceleration, speed, deceleration Programs are downloaded from an external P.C Acceleration : 0,01 à 2 G Resolution 0,5 µm Speed : up to 2 m/s Stable and Reproducable process Cleanroom Compatible Optimal accessibility for service and maintenance Durable low maintenance design for maximum "uptime" Common European (CE) Product Safety Certification SMEMA Compliant * Special upon request MATERIAL HANDLING SYSTEMS Robotherm( WORHOLDER / INDEXER SERIES Film & Tape Automatic Workholder / Indexer Smart Card Tape Automatic Worholder / Indexer APPLICATIONS Film & Tape Indexing - Wire Bonding - Die Bonding - Testing OEM Equipements Upgrading - Ball Bonder - Wedge Bonder - Die Bonder - Die Attach Cure - STANDARD FEATURES & BENEFITS Workholder - Vacuum Hold Down and/or Mechanical Clamping - Dedicated Platen per Tape Design & Characteristics - Adjustable working Width Motorized Clamp - Lateral or Transversal Clamping - Pneumatic activation - Programmable sequences Electronic controller for following parameters - Indexing sequences - Index pitch - Acceleration, speed, deceleration Programs are download from an external P.C Acceleration : 0,01 à 2 G Resolution 0,5 µm Speed : up to 2 m/s Stable and Reproducable process Cleanroom Compatible Optimal accessibility for service and maintenance Durable low maintenance design for maximum "uptime" Common European (CE) Product Safety Certification SMEMA Compliant MATERIAL HANDLING SYSTEMS Robotherm( WORHOLDER / INDEXER SERIES Automatic X-Y-Theta Table Automatic X-Y Table APPLICATIONS Working Area Extension - Hybrid Bonding - Stitch Bonding - Die Attach - Bumping - Encapsulation OEM Equipements Upgrading - Ball Bonder - Wedge Bonder - Die Bonder - Die Attach Cure - Encapsulation STANDARD FEATURES & BENEFITS X Axis stroke, 150 mm Y Axis stroke, 70 mm *Theta Motion, 270° Workholder - Vacuum hold down and/or clamping - Heated or cold block Software Controlled Parameters - Indexing sequences - Index pitch - Acceleration, speed, deceleration - XYTheta coordinate RS 232 Communications Acceleration : 0,01 à 2 G Resolution 0,5 µm Speed : up to 2 m/s Stable and Reproducable process Cleanroom Compatible Optimal accessibility for service and maintenance Durable low maintenance design for maximum "uptime" Common European (CE) Product Safety Certification SMEMA Compliant MATERIAL HANDLING SYSTEMS Robotherm( TAPE & REEL HANDLER SERIES Automatic Winder/Unwinder E/D 500-2 Automatic Winder/Unwinder E/D 700-4 APPLICATIONS Reel-to-Reel Processing - Unwinding of Tape / Winding of Separator - Winding of Tape / Unwinding of Separator OEM Equipements Upgrading - Ball Bonder - Wedge Bonder - Die Bonder - Die Attach Cure STANDARD FEATURES & BENEFITS Input - Unwinding of the Tape and winding of the Separator - Tape only is delivered to the machine, while the Separator is winded to an empty reel Output - Winding of the Tape and unwinding of the Separator - Tape is delivered from the machine, while the Separator is unwinded from a full reel A Pulley & Multi "Vee" Belt system allows manual winding/unwinding without any risk of damage to the shafts nor the motors. Winding/Unwinding sequences are controlled by Loop Photodetection Systems Compatibility with the widest range of reels Stable and Reproducable process Cleanroom Compatible Optimal accessibility for service and maintenance Durable low maintenance design for maximum "uptime" Common European (CE) Product Safety Certification SMEMA Compliant MATERIAL HANDLING SYSTEMS Robotherm( TAPE & REEL HANDLER SERIES Automatic Winder/Unwinder E/D 600-2 APPLICATIONS Reel-to-Reel Processing - Unwinding of Large Tape / Winding of Separator - Winding of Large Tape / Unwinding of Separator STANDARD FEATURES & BENEFITS Input Arm - Unwinding of the Tape and winding of the Separator - Tape only is delivered to the machine, while the Separator is winded to an empty reel Output Arm - Winding of the Tape and unwinding of the Separator - Tape is delivered from the machine, while the Tape-Separator is unwinded from a full reel A Pulley & Multi "Vee" Belt system allows manual winding/unwinding without any risk of damage to the shafts nor the motors. Winding/Unwinding sequences are controlled by Loop Photodetection Systems Compatibility with the widest range of reels Stable and Reproducable process Cleanroom Compatible Optimal accessibility for service and maintenance Durable low maintenance design for maximum "uptime" Common European (CE) Product Safety Certification SMEMA Compliant MATERIAL HANDLING SYSTEMS Robotherm( TAPE & REEL HANDLER SERIES Automatic Winder/Unwinder E/D 801* (Controlled Winding Torque) Automatic Winder/Unwinder E/D 802** (Tape & Separator management) APPLICATIONS Reel-to-Reel Processing - *Unwinding of Large Tape - *Winding of Large Tape with Constant Tension - **Winding/Unwinding of Large Tape & Separator STANDARD FEATURES & BENEFITS *Controlled Winding Torque **Motorized shaft / Braked Shaft Adaptable Back Flange Self Centering Nut Splice Table A Pulley & Multi "Vee" Belt system allows manual winding/unwinding without any risk of damage to the shafts nor the motors. Winding/Unwinding sequences are controlled by Loop Photodetection Systems Compatibility with the widest range of reels Stable and Reproducable process Cleanroom Compatible Optimal accessibility for service and maintenance Durable low maintenance design for maximum "uptime" Common European (CE) Product Safety Certification SMEMA Compliant In Caléo Engineering's policy for continuous improvement, specifications can change without prior notice June 2001 www.caleo-engineering.com a Caléo Company In Caléo Engineering's policy for continuous improvement, specifications can change without prior notice June 2001 www.caleo-engineering.com In Caléo Engineering's policy for continuous improvement, specifications can change without prior notice June 2001 www.caleo-engineering.com a Caléo Company In Caléo Engineering's policy for continuous improvement, specifications can change without prior notice June 2001 www.caleo-engineering.com a Caléo Company In Caléo Engineering's policy for continuous improvement, specifications can change without prior notice June 2001 www.caleo-engineering.com a Caléo Company In Caléo Engineering's policy for continuous improvement, specifications can change without prior notice June 2001 www.caleo-engineering.com a Caléo Company In Caléo Engineering's policy for continuous improvement, specifications can change without prior notice June 2001 www.caleo-engineering.com a Caléo Company In Caléo Engineering's policy for continuous improvement, specifications can change without prior notice June 2001 www.caleo-engineering.com a Caléo Company In Caléo Engineering's policy for continuous improvement, specifications can change without prior notice June 2001 www.caleo-engineering.com a Caléo Company In Caléo Engineering's policy for continuous improvement, specifications can change without prior notice June 2001 www.caleo-engineering.com a Caléo Company In Caléo Engineering's policy for continuous improvement, specifications can change without prior notice June 2001 www.caleo-engineering.com a Caléo Company In Caléo Engineering's policy for continuous improvement, specifications can change without prior notice June 2001 www.caleo-engineering.com a Caléo Company